USPatent applicationPatented

Deposition ring for a semiconductor processing chamber

Granted 19 Oct 2021 · no office action yet

Application· this page
29/744,882
filed 31 Jul 2020
Publication
Not published
not published
Patent
US D933726
granted 19 Oct 2021

Life of the application

5 dated events
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Description

1 parts
›FIG. 1 is an enlarged top isometric view…

FIG. 1 is an enlarged top isometric view of a deposition ring for a semiconductor processing chamber, according to the first embodiment of the novel design.

FIG. 2 is a front elevation view thereof.

FIG. 3 is a back elevation view thereof.

FIG. 4 is a right elevation view thereof.

FIG. 5 is a left elevation view thereof.

FIG. 6 is a top plan view thereof.

FIG. 7 is a bottom plan view thereof.

FIG. 8 is an enlarged cross-sectional view thereof, taken along line 6 - 6 of FIG. 6 .

FIG. 9 is an enlarged top isometric view of a deposition ring for a semiconductor processing chamber, according to the second embodiment of the novel design.

FIG. 10 is a front elevation view thereof.

FIG. 11 is a back elevation view thereof.

FIG. 12 is a right elevation view thereof.

FIG. 13 is a left elevation view thereof.

FIG. 14 is a top plan view thereof.

FIG. 15 is a bottom plan view thereof.

FIG. 16 is an enlarged cross-sectional view thereof, taken along line 16 - 16 of FIG. 14 ; and,

FIG. 17 is an enlarged cross-sectional view thereof, taken along line 17 - 17 of FIG. 14 .

The dashed lines in FIGS. 1-9 represent unclaimed environment forming no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims as granted

1 claim

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Classifications

2 codes
USPC · US Patent Classification
D15/138D13/182

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File wrapper

⤢ drag to zoomJul 2020Oct 2020Jan 2021Apr 2021Jul 2021Oct 2021USPTOApplicantNotice of allowance
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Pendency
1.2 y
445 days filing → grant
Office actions
0
none on record
Responses
1
no RCE
Examiner
Sheryl Lane
art unit 2915 · TC 2900
Citations: 54 back · 0 forward

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Chain of title

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