Inventor
Jiao SONG
Inventor
SG
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material26%
H01JElectric discharge tubes or discharge lamps26%
LOC1516%
H01LSemiconductor devices11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
LOC135%
PatentTitleYear
11,846,013Methods and apparatus for extended chamber for through silicon via deposition2023D1007449Target profile for a physical vapor deposition chamber target202311,784,033Methods and apparatus for processing a substrate202311,581,166Low profile deposition ring for enhanced life2023D0966357Target profile for a physical vapor deposition chamber target202211,295,938Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof2022D0940765Target profile for a physical vapor deposition chamber target202211,189,472Cathode assembly having a dual position magnetron and centrally fed coolant2021D0933726Deposition ring for a semiconductor processing chamber2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2023Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2021–2023Based in SG· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2021–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| SG | 9 | 2021–2023 |