Target profile for a physical vapor deposition chamber target
Granted 12 Dec 2023 · no office action yet
Current assignee: Applied Materials South East Asia Pte · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Nuno Yen-Chu Chen, Kirankumar Neelasandra Savandaiah, Jiao Song, Mengxue Wu +3 · Examiner: Calvin E Vansant · AU 2915 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a sputtering target for a physical vapor deposition chamber, according to one embodiment of the novel design.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a right side elevation view thereof.
FIG. 5 is a left side elevation view thereof.
FIG. 6 is a front elevation thereof.
FIG. 7 is a back elevation view thereof; and,
FIG. 8 is an enlarged partial right side elevation view showing portions of the design in greater detail.
The dash-dash broken lines in FIGS. 1 - 8 represent unclaimed environment and form no part of the claimed design.
The short dash-dot lines on FIG. 4 and FIG. 8 depict the bounds of the region taken from FIG. 4 to be enlarged on FIG. 8 and form no part of the claimed design.
Claims
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5 members · 3 offices›IP5 & PCT — 3 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D1007449-S | S1 | 12 Dec 2023 | 7 May 2021 | granted | Target profile for a physical vapor deposition chamber target |
| JP | JP-1718363-S | S | 28 Jun 2022 | 8 Nov 2021 | granted | 物理的気相堆積チャンバターゲットのためのターゲットプロファイルja |
| JP | JP-1730204-S | S | 18 Nov 2022 | 8 Nov 2021 | granted | 物理的気相堆積チャンバターゲットのためのターゲットプロファイルja |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D226530-S | S | 21 Jul 2023 | 1 Nov 2021 | published | 用於物理氣相沉積腔室的靶材zh |
| TW | TW-D237732-S | S | 21 Apr 2025 | 1 Nov 2021 | published | Target for a physical vapor deposition chamber |
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