Deposition ring for a semiconductor processing chamber
Granted 19 Oct 2021 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Anthony Chih-Tung Chan, Kirankumar Neelasandra Savandaiah, Jiao Song, Irena H. Wysok +1 · Examiner: Sheryl Lane · AU 2915 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is an enlarged top isometric view…
FIG. 1 is an enlarged top isometric view of a deposition ring for a semiconductor processing chamber, according to the first embodiment of the novel design.
FIG. 2 is a front elevation view thereof.
FIG. 3 is a back elevation view thereof.
FIG. 4 is a right elevation view thereof.
FIG. 5 is a left elevation view thereof.
FIG. 6 is a top plan view thereof.
FIG. 7 is a bottom plan view thereof.
FIG. 8 is an enlarged cross-sectional view thereof, taken along line 6 - 6 of FIG. 6 .
FIG. 9 is an enlarged top isometric view of a deposition ring for a semiconductor processing chamber, according to the second embodiment of the novel design.
FIG. 10 is a front elevation view thereof.
FIG. 11 is a back elevation view thereof.
FIG. 12 is a right elevation view thereof.
FIG. 13 is a left elevation view thereof.
FIG. 14 is a top plan view thereof.
FIG. 15 is a bottom plan view thereof.
FIG. 16 is an enlarged cross-sectional view thereof, taken along line 16 - 16 of FIG. 14 ; and,
FIG. 17 is an enlarged cross-sectional view thereof, taken along line 17 - 17 of FIG. 14 .
The dashed lines in FIGS. 1-9 represent unclaimed environment forming no part of the claimed design.
Claims
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5 members · 3 offices›IP5 & PCT — 3 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D933726-S | S1 | 19 Oct 2021 | 31 Jul 2020 | granted | Deposition ring for a semiconductor processing chamber |
| JP | JP-1704604-S | S | 13 Jan 2022 | 1 Feb 2021 | granted | 半導体処理チャンバのための堆積リングja |
| JP | JP-1708687-S | S | 1 Mar 2022 | 1 Feb 2021 | granted | 半導体処理チャンバのための堆積リングja |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D217572-S | S | 11 Mar 2022 | 25 Jan 2021 | published | 用於半導體處理腔室的沉積環zh |
| TW | TW-D217686-S | S | 11 Mar 2022 | 25 Jan 2021 | published | Deposition ring for a semiconductor processing chamber |
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