Inventor
Kazuyuki Hirozane
Inventor
Tokyo, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
LOC13primary
LOC13100%
PatentTitleYear
D0924824Ion shield plate base for semiconductor manufacturing apparatus2021D0901407Integrated type ion shield for semiconductor manufacturing apparatus2020D0900760Ion shield plate for semiconductor manufacturing apparatus2020D0864885Infrared lamp heater transmission window for semiconductor manufacturing apparatus2019Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2019–2021Patents assigned to HITACHI HIGH TECH CORP (4)· patent assignee history
2019–2021Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 4 | 2019–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 4 | 2019–2021 |