Infrared lamp heater transmission window for semiconductor manufacturing apparatus
Granted 29 Oct 2019 · no office action yet
Current assignee: Hitachi High-Tech Instruments Co., Ltd · originally Hitachi, Ltd.
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Attorney: Attorney · Log in to unlock
Inventors: Michiaki Kobayashi, Akio Harada, Kazuyuki Hirozane, Yutaka Kouzuma +1 · Examiner: Janice Hallmark · AU 2916 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front, top and right…
FIG. 1 is a front, top and right side perspective view of an infrared lamp heater transmission window for semiconductor manufacturing apparatus according to the design;
FIG. 2 is a rear, bottom and left side perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a rear elevational view thereof;
FIG. 9 is an end view taken along line 9 - 9 of FIG. 3 ; and,
FIG. 10 is an end view taken along line 10 - 10 of FIG. 8 .
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D864885-S | S1 | 29 Oct 2019 | 27 Feb 2018 | granted | Infrared lamp heater transmission window for semiconductor manufacturing apparatus |
| JP | JP-1605838-S | S | 4 Jun 2018 | 10 Nov 2017 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D193794-S | S | 1 Nov 2018 | 27 Feb 2018 | published | Semiconductor manufacturing device uses infrared lamp heater to penetrate windowzh |
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