Ion shield plate base for semiconductor manufacturing apparatus
Granted 13 Jul 2021 · no office action yet
Current assignee: Hitachi High-Tech Instruments Co., Ltd · originally Hitachi, Ltd.
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Attorney: Attorney · Log in to unlock
Inventors: Yoshifumi Ogawa, Michiaki Kobayashi, Kazuyuki Hirozane, Yutaka Kouzuma · Examiner: Elizabeth J Oswecki · AU 2926 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›FIG. 1 is a front, top and right…
FIG. 1 is a front, top and right side perspective view of an ion shield plate base for semiconductor manufacturing apparatus, showing our new design;
FIG. 2 is a rear, bottom and left side perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a top plan view thereof;
FIG. 8 is a bottom plan view thereof;
FIG. 9 is a cross-sectional view taken along line 9 - 9 of FIG. 7 ;
FIG. 10 is an enlarged view of the portion shown in box, labeled, “ FIG. 10 ,” in FIG. 9 ; and,
FIG. 11 is an enlarged view of the portion shown in box, labeled, “ FIG. 11 ,” in FIG. 9 .
The broken line boxes shown in FIG. 9 define the enlarged portion views shown in FIGS. 10 and 11 and form no part of the claimed design.
Claims
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D924824-S | S1 | 13 Jul 2021 | 23 Jan 2019 | granted | Ion shield plate base for semiconductor manufacturing apparatus |
| JP | JP-1624793-S | S | 18 Feb 2019 | 24 Jul 2018 | granted | no title held |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D202287-S | S | 21 Jan 2020 | 24 Jan 2019 | published | 半導體製造裝置用離子遮蔽板保持具zh |
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