Inventor
MANJUNATHA P. KOPPA
Inventor
IN
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
LOC15primary
LOC1536%
H01JElectric discharge tubes or discharge lamps18%
H01LSemiconductor devices18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
C23CCoating metallic material9%
PatentTitleYear
11,887,878Detachable biasable electrostatic chuck for high temperature applications2024D0960216Base plate for a processing chamber substrate support2022D0947914Base plate for a processing chamber substrate support202211,251,028Pre-clean chamber with integrated shutter garage2022D0942516Process shield for a substrate processing chamber2022D0933725Deposition ring for a substrate processing chamber2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to APPLIED MATERIALS INC (6)· patent assignee history
2021–2024Based in IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 6 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| IN | 6 | 2021–2024 |