Base plate for a processing chamber substrate support
Granted 9 Aug 2022 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Mukund Sundararajan, Manjunatha P. Koppa, Cheng-Hsiung Matthew Tsai, Shreesha Yogish Rao +1 · Examiner: Calvin E Vansant · AU 2915 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a back elevation view thereof.
FIG. 7 is a left side elevation view thereof.
FIG. 8 is a right side elevation view thereof.
FIG. 9 is a cross-sectional view taken along line 9 - 9 in FIG. 3 ; and,
FIG. 10 is a cross-sectional view taken along line 10 - 10 in FIG. 3 .
The broken lines depict portions of the article that form no part of the claim.
Claims
1 · 1 independent · depth 1Classifications
2 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this patent are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlockTerm & fees
See the term timeline — pendency span, in-force span, the maintenance fees paid and both computed expiry dates.
Log in to unlockWorldwide family
4 members · 2 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| US | US-D947914-S | S1 | 5 Apr 2022 | 23 Nov 2020 | granted | Base plate for a processing chamber substrate support |
| USthis patent | US-D960216-S | S1 | 9 Aug 2022 | 11 Mar 2022 | granted | Base plate for a processing chamber substrate support |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D217559-S | S | 11 Mar 2022 | 4 Dec 2020 | published | Base plate for a processing chamber substrate support |
| TW | TW-D224469-S | S | 1 Apr 2023 | 4 Dec 2020 | published | 基板支撐件的基底板zh |
Validity challenges
See the validity challenges on record — reexaminations, IPRs and PGRs, with their institution decisions and outcomes.
Log in to unlockCitations
See every patent this one cites and every patent that cites it back — publication, assignee, and how each one was found.
Log in to unlock