Base plate for a processing chamber substrate support
Granted 5 Apr 2022 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Mukund Sundararajan, Cheng-Hsiung Matthew Tsai, Manjunatha P. Koppa, Steven V. Sansoni +1 · Examiner: Sheryl Lane · AU 2915 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a back elevation view thereof.
FIG. 7 is a left side elevation view thereof.
FIG. 8 is a right side elevation view thereof.
FIG. 9 is a cross-sectional view taken along line 9 - 9 in FIG. 3 ; and,
FIG. 10 is a cross-sectional view taken along line 10 - 10 in FIG. 3 .
The broken lines in the drawings depict portions of the article that form no part of the claimed design.
Claims
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4 members · 2 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D947914-S | S1 | 5 Apr 2022 | 23 Nov 2020 | granted | Base plate for a processing chamber substrate support |
| US | US-D960216-S | S1 | 9 Aug 2022 | 11 Mar 2022 | granted | Base plate for a processing chamber substrate support |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D217559-S | S | 11 Mar 2022 | 4 Dec 2020 | published | Base plate for a processing chamber substrate support |
| TW | TW-D224469-S | S | 1 Apr 2023 | 4 Dec 2020 | published | 基板支撐件的基底板zh |
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