Base plate for a processing chamber substrate support
Granted 5 Apr 2022 · 1 office action
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Mukund Sundararajan, Cheng-Hsiung Matthew Tsai, Manjunatha P. Koppa, Steven V. Sansoni +1 · Examiner: Sheryl Lane · AU 2915 · TC 2900
Life of the application
6 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a back elevation view thereof.
FIG. 7 is a left side elevation view thereof.
FIG. 8 is a right side elevation view thereof.
FIG. 9 is a cross-sectional view taken along line 9 - 9 in FIG. 3 ; and,
FIG. 10 is a cross-sectional view taken along line 10 - 10 in FIG. 3 .
The broken lines in the drawings depict portions of the article that form no part of the claimed design.
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