Reactant source vessel
Granted 20 Apr 2010 · no office action yet
Assignee: ASM International
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Mohith Verghese, Eric J Shero, Kyle Fondurulia, Carl L White · Examiner: Sandra Snapp · AU 2915 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a reactant source vessel of the present invention;
FIG. 2 is top view thereof;
FIG. 3 is a side view thereof; and,
FIG. 4 is a cross-sectional side view thereof, taken along the line 4 — 4 of FIG. 2 .
The bottom view has been omitted and forms no part of the claimed design.
The ornamental design which is claimed is shown in solid lines in the drawings. Any broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.
Claims
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15 members · 6 offices›IP5 & PCT — 13 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| US | US-2008085226-A1 | A1 | 10 Apr 2008 | 10 Oct 2007 | published | Precursor delivery system |
| USthis patent | US-D614153-S | S1 | 20 Apr 2010 | 6 Apr 2009 | granted | Reactant source vessel |
| US | US-8137462-B2 | B2 | 20 Mar 2012 | 10 Oct 2007 | granted | Precursor delivery system |
| US | US-2012156108-A1 | A1 | 21 Jun 2012 | 24 Feb 2012 | published | Precursor delivery system |
| US | US-9593416-B2 | B2 | 14 Mar 2017 | 24 Feb 2012 | granted | Precursor delivery system |
| JP | JP-2010506429-A | A | 25 Feb 2010 | 10 Oct 2007 | published | 前駆体送出システムja |
| JP | JP-5073751-B2 | B2 | 14 Nov 2012 | 10 Oct 2007 | granted | 前駆体送出システムja |
| KR | KR-20090086548-A | A | 13 Aug 2009 | 10 Oct 2007 | published | 전구체 전달 시스템ko |
| KR | KR-101480971-B1 | B1 | 9 Jan 2015 | 10 Oct 2007 | granted | 전구체 전달 시스템ko |
| CN | CN-101522943-A | A | 2 Sep 2009 | 10 Oct 2007 | published | Precursor delivery system |
| CN | CN-101522943-B | B | 24 Apr 2013 | 10 Oct 2007 | granted | Precursor delivery system |
| WO | WO-2008045972-A2 | A2 | 17 Apr 2008 | 10 Oct 2007 | published | Precursor delivery system |
| WO | WO-2008045972-A3 | A3 | 2 Oct 2008 | 10 Oct 2007 | published | Precursor delivery system |
›Other offices — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-200831698-A | A | 1 Aug 2008 | 11 Oct 2007 | published | Precursor delivery system |
| TW | TW-I426155-B | B | 11 Feb 2014 | 11 Oct 2007 | granted | 前驅體輸送系統zh |
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