Inventor
Carl White
Inventor
Gilbert, AZ, US
Overview
Patents· 37 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material37%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices14%
H01JElectric discharge tubes or discharge lamps8%
Y10TTechnical subjects covered by former us classification4%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry3%
C30BSingle-crystal growth3%
F16KValves2%
B08BCleaning in general1%
F27BFurnaces, kilns, ovens or retorts in general1%
PatentTitleYear
10,876,205Reactant vaporizer and related systems and methods202010,872,804Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination202010,872,803Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination202010,858,737Showerhead assembly and components thereof202010,844,486Semiconductor processing reactor and components thereof202010,832,903Process feed management for semiconductor substrate processing202010,714,315Semiconductor reaction chamber showerhead202010,683,571Gas supply manifold and method of supplying gases to chamber using same202010,529,542Cross-flow reactor and method202010,480,072Semiconductor processing reactor and components thereof201910,468,291Reaction system for growing a thin film201910,370,761Pulsed valve manifold for atomic layer deposition201910,276,355Multi-zone reactor, system including the reactor, and method of using the same201910,266,946Pulsed valve manifold for atomic layer deposition20199,892,908'Process feed management for semiconductor substrate processing'20189,593,416'Precursor delivery system'20179,574,268'Pulsed valve manifold for atomic layer deposition'20179,394,608'Semiconductor processing reactor and components thereof'20169,388,492'Vapor flow control apparatus for atomic layer deposition'20169,359,672'Reaction system for growing a thin film'20169,340,874'Chamber sealing member'20169,202,727'Susceptor heater shim'20159,096,931'Deposition valve assembly and method of heating the same'20159,017,481'Process feed management for semiconductor substrate processing'20159,005,539'Chamber sealing member'20158,986,456'Precursor delivery system'20158,216,380'Gap maintenance for opening to process chamber'20128,211,230'Reaction system for growing a thin film'20128,137,462'Precursor delivery system'2012D0614153'Reactant source vessel'20107,595,271'Polymer coating for vapor deposition tool'20097,571,893'Valve with high temperature rating'20095,897,380'Method for isolating a susceptor heating element from a chemical vapor deposition environment'19995,562,947'Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment'19965,370,739'Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD'19945,356,476'Semiconductor wafer processing method and apparatus with heat and gas flow control'19945,273,588'Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993–2020Based in Gilbert, AZ, US· patent location history
2009–2019Patents assigned to ASM INC (17)· patent assignee history
2012–2017Patents assigned to SHERO ERIC (11)· patent assignee history
2012–2017Patents assigned to FONDURULIA KYLE (6)· patent assignee history
2012–2017Patents assigned to WHITE CARL (6)· patent assignee history
2015–2020Patents assigned to ASM IP HOLDING BV (13)· patent assignee history
2020Based in Phoenix, AZ, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM INC | 17 | 2009–2019 |
| ASM IP HOLDING BV | 13 | 2015–2020 |
| SHERO ERIC | 11 | 2012–2017 |
| FONDURULIA KYLE | 6 | 2012–2017 |
| WHITE CARLself | 6 | 2012–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Gilbert, AZ, US | 36 | 1993–2020 |
| Phoenix, AZ, US | 1 | 2020 |