Reactant source vessel
Granted 20 Apr 2010 · no office action yet
Assignee: ASM International
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Attorney: Attorney · Log in to unlock
Inventors: Mohith Verghese, Eric J Shero, Kyle Fondurulia, Carl L White · Examiner: Sandra Snapp · AU 2915 · TC 2900
Life of the application
6 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a reactant source vessel of the present invention;
FIG. 2 is top view thereof;
FIG. 3 is a side view thereof; and,
FIG. 4 is a cross-sectional side view thereof, taken along the line 4 — 4 of FIG. 2 .
The bottom view has been omitted and forms no part of the claimed design.
The ornamental design which is claimed is shown in solid lines in the drawings. Any broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.
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