USPatentGranted
B2

Method for producing group III nitride semiconductor light-emitting device, group III nitride semiconductor light-emitting device, and lamp

Granted 21 May 2013 · 4 office actions

Life of the patent

3 dated events
⤢ drag to zoomJul 2009Jan 2010Jul 2010Jan 2011Jul 2011Jan 2012Jul 2012Jan 2013Jul 2013Prosecution
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Abstract

One object of the present invention is to provide a method for producing a group III nitride semiconductor light-emitting device which has excellent productivity and produce a group III nitride semiconductor light-emitting device and a lamp, a method for producing a group III nitride semiconductor light-emitting device, in which a buffer layer ( 12 ) made of a group III nitride is laminated on a substrate ( 11 ), an n-type semiconductor layer ( 14 ) comprising a base layer ( 14 a ), a light-emitting layer ( 15 ), and a p-type semiconductor layer ( 16 ) are laminated on the buffer layer ( 12 ) in this order, comprising: a pretreatment step in which the substrate ( 11 ) is treated with plasma; a buffer layer formation step in which the buffer layer ( 12 ) having a composition represented by Al x Ga 1-x N (0≦x<1) is formed on the pretreated substrate ( 11 ) by activating with plasma and reacting at least a metal gallium raw material and a gas containing a group V element; and a base layer formation step in which the base layer ( 14 a ) is formed on the buffer layer ( 12 ).

Claims

41 · 2 independent · depth 4
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41 granted claims

Classifications

6 codes
IPC · International Patent Classification
Section H — Electricity
  • H01L33/00
  • H01L21/00
USPC · US Patent Classification
438/47257/E33.025257/E33.027257/103

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File wrapper

Pendency
4.0 y
1,448 days filing → grant
Office actions
2
non-final + final
Responses
3
1 RCE
Interviews
2
examiner interview summaries
Examiner
David S Blum
art unit 2813 · TC 2800
Citations: 18 back · 0 forward

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Priority chain

1 priority documents
›Priority documents — 1
TypeDocumentDate
related publicationUS 20110084307 A114 Apr 2011

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