Substrate support for a substrate processing chamber
Granted 22 Apr 2025 · 2 office actions
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Cheng-Hsiung Matthew Tsai, Jiang Lu, Zubin Huang, Michael Sterling Jackson +2 · Examiner: Brett Miller · AU 2925 · TC 2900
Life of the application
4 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of a substrate support for a substrate processing chamber, showing our new design.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a front elevation view thereof.
FIG. 5 is a back elevation view thereof.
FIG. 6 is a left elevation view thereof.
FIG. 7 is a right elevation view thereof; and,
FIG. 8 is an enlarged cross-sectional view taken along line 8 - 8 in FIG. 2 .
The dashed lines in FIGS. 1 - 8 illustrate portions of the article that form no part of the claimed design.
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