Deposition chamber cover ring
Granted 14 Aug 2012 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Anantha K. Subramani, Ashish Goel · Examiner: David Muller · AU 2914 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›FIG. 1 is a bottom perspective view of…
FIG. 1 is a bottom perspective view of a deposition chamber cover ring.
FIG. 2 is a top perspective view of the deposition chamber cover ring of FIG. 1 .
FIG. 3 is a bottom plan view of the deposition chamber cover ring of FIG. 1 .
FIG. 4 is a top plan view of the deposition chamber cover ring of FIG. 1 .
FIG. 5 is a side elevation view of the deposition chamber cover ring of FIG. 1 , the other sides being identical; and,
FIG. 6 is an enlarged partial side cross-sectional view of the deposition chamber cover ring of FIG. 1 taken along section line 6 - 6 of FIG. 5 .
The jagged line on the side of FIG. 6 is utilized to show where the enlarged view is broken away from the remainder of the deposition chamber cover ring of FIG. 5 . The jagged line forms no part of the claimed design.
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