USPatentGranted
S1

Deposition chamber cover ring

Granted 14 Aug 2012 · no office action yet

Current assignee: Applied Materials Israel · originally Applied Materials, Inc.

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Inventors: Anantha K. Subramani, Ashish Goel · Examiner: David Muller · AU 2914 · TC 2900

Application
29/411,713
filed 25 Jan 2012
Publication
Not published
not published
Patent· this page
US D665491
granted 14 Aug 2012

Life of the patent

5 dated events
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Description

1 parts
›FIG. 1 is a bottom perspective view of…

FIG. 1 is a bottom perspective view of a deposition chamber cover ring.

FIG. 2 is a top perspective view of the deposition chamber cover ring of FIG. 1 .

FIG. 3 is a bottom plan view of the deposition chamber cover ring of FIG. 1 .

FIG. 4 is a top plan view of the deposition chamber cover ring of FIG. 1 .

FIG. 5 is a side elevation view of the deposition chamber cover ring of FIG. 1 , the other sides being identical; and,

FIG. 6 is an enlarged partial side cross-sectional view of the deposition chamber cover ring of FIG. 1 taken along section line 6 - 6 of FIG. 5 .

The jagged line on the side of FIG. 6 is utilized to show where the enlarged view is broken away from the remainder of the deposition chamber cover ring of FIG. 5 . The jagged line forms no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

2 codes
USPC · US Patent Classification
D23/386D15/144

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File wrapper

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Pendency
0.6 y
202 days filing → grant
Office actions
0
none on record
Examiner
David Muller
art unit 2914 · TC 2900
Citations: 23 back · 0 forward

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Chain of title

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Term & fees

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Worldwide family

2 members · 2 offices
US1TW1
this patentIP5 & PCTother officessolid = grantedhover for detail · click to open
Members
2
DOCDB simple family 46613971
Offices
2
US
Granted
1 of 2
grant date present
›IP5 & PCT — 1 members
OfficePublicationKindPublishedFiledStatusTitle
USthis patentUS-D665491-SS114 Aug 201225 Jan 2012grantedDeposition chamber cover ring
›Other offices — 1 members
OfficePublicationKindPublishedFiledStatusTitle
TWTW-D153356-SS1 May 201320 Jul 2012publishedDeposition chamber cover ring

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Citations

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