USPatent applicationPatented

Electroplating flow shaping plate having offset spiral hole pattern

Granted 8 Nov 2011 · no office action yet

Current assignee: Novellus Systems, Inc. · originally Lam Research

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Inventors: Robert Rash, David Porter, Steven T. Mayer · Examiner: Selina Sikder · AU 2912 · TC 2900

Application· this page
29/377,521
filed 21 Oct 2010
Publication
Not published
not published
Patent
US D648289
granted 8 Nov 2011

Life of the application

5 dated events
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Description

1 parts
›FIG. 1 is a front plan view of…

FIG. 1 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing an embodiment of our new design;

FIG. 2 is a bottom view thereof;

FIG. 3 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 4 is a front perspective view thereof; and

FIG. 5 is a rear perspective view thereof.

FIG. 6 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing a second embodiment of our new design;

FIG. 7 is a bottom view thereof;

FIG. 8 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 9 is a front perspective view thereof; and

FIG. 10 is a rear perspective view thereof.

FIG. 11 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing a third embodiment of our new design;

FIG. 12 is a bottom view thereof; and

FIG. 13 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 14 is a front perspective view thereof; and

FIG. 15 is a rear perspective view thereof.

FIG. 16 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing a fourth embodiment of our new design;

FIG. 17 is a bottom view thereof; and

FIG. 18 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 19 is a front perspective view thereof; and,

FIG. 20 is a rear perspective view thereof.

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Claims as granted

1 claim

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Classifications

1 codes
USPC · US Patent Classification
D13/182

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File wrapper

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Pendency
1.0 y
383 days filing → grant
Office actions
0
none on record
Responses
1
no RCE
Examiner
Selina Sikder
art unit 2912 · TC 2900
Citations: 25 back · 0 forward

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Documents

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Chain of title

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