Lid assembly for a substrate processing chamber

FIG. 1 is a top plan view of a lid assembly for a substrate processing chamber showing our new design.

FIG. 2 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 2 of FIG. 1 .

FIG. 3 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 3 of FIG. 1 .

FIG. 4 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 4 of FIG. 1 .

FIG. 5 is a side elevation view of the lid assembly of FIG. 1 , rotated 180°, as viewed from line FIG. 5 of FIG. 1 .

FIG. 6 is an isometric top view of the lid assembly of FIG. 1 .

FIG. 7 is another isometric top view of the lid assembly of FIG. 1 .

FIG. 8 is an isometric bottom view of the lid assembly of FIG. 1 ; and,

FIG. 9 is a bottom plan view of the lid assembly of FIG. 1 .

The broken line showing of structural features is included for the purpose of illustrating non-claimed subject matter and forms no part of the claimed design.