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USPatentGranted
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Lid assembly for a substrate processing chamber

Granted 2 Aug 2011 · 2 office actions

Current assignee: Applied Materials Israel · originally Applied Materials, Inc.

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Attorney: Attorney · Log in to unlock

Inventors: Alexander Tam, David H. Quach, Tetsuya Ishikawa · Examiner: Antoine D Davis · AU 2917 · TC 2900

Application
29/358,979
filed 2 Apr 2010
Publication
Not published
not published
Patent· this page
US D642605
granted 2 Aug 2011
1
Claims
1 independent
33
File wrapper
transactions
2030
20-year term
term adjustment not held
none
Litigation
checked
1
Classifications
21
Citations
21 cites · 0 cited by

Life of the patent

2 dated events
⤢ drag to zoomApr 2010Jul 2010Oct 2010Jan 2011Apr 2011Jul 2011Oct 2011Prosecution
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Description

1 parts
›FIG. 1 is a top plan view of…

FIG. 1 is a top plan view of a lid assembly for a substrate processing chamber showing our new design.

FIG. 2 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 2 of FIG. 1 .

FIG. 3 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 3 of FIG. 1 .

FIG. 4 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 4 of FIG. 1 .

FIG. 5 is a side elevation view of the lid assembly of FIG. 1 , rotated 180°, as viewed from line FIG. 5 of FIG. 1 .

FIG. 6 is an isometric top view of the lid assembly of FIG. 1 .

FIG. 7 is another isometric top view of the lid assembly of FIG. 1 .

FIG. 8 is an isometric bottom view of the lid assembly of FIG. 1 ; and,

FIG. 9 is a bottom plan view of the lid assembly of FIG. 1 .

The broken line showing of structural features is included for the purpose of illustrating non-claimed subject matter and forms no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D15/144.1

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File wrapper

Pendency
1.3 y
487 days filing → grant
Office actions
1
non-final + final
Responses
1
no RCE
Examiner
Antoine D Davis
art unit 2917 · TC 2900
Law firm
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Citations: 21 back · 0 forward

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Chain of title

⤢ drag to zoom20102012201420162018202020222024202620282030Owner 1
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Worldwide family

2 members · 2 offices
US1TW1
this patentIP5 & PCTother officessolid = grantedhover for detail · click to open
Members
2
DOCDB simple family 44314772
Offices
2
US
Granted
1 of 2
grant date present
›IP5 & PCT — 1 members
OfficePublicationKindPublishedFiledStatusTitle
USthis patentUS-D642605-SS12 Aug 20112 Apr 2010grantedLid assembly for a substrate processing chamber
›Other offices — 1 members
OfficePublicationKindPublishedFiledStatusTitle
TWTW-D141830-S1S11 Aug 20113 Aug 2010publishedLid assembly for substrate processing chamber

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Citations

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