USPatent applicationPatented

Wafer transfer apparatus

Granted 19 Feb 2008 · 2 office actions

Assignee: Tokyo Electron Limited

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Inventors: Takehiro Shindo, Wataru Machiyama, Tsutomu Hiroki · Examiner: Cynthia E. Ramirez · AU 2911 · TC 2900

Application· this page
29/220,627
filed 5 Jan 2005
Publication
Not published
not published
Patent
US D562524
granted 19 Feb 2008

Life of the application

9 dated events
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Description

1 parts
›FIG. 1 is a top view of the…

FIG. 1 is a top view of the wafer transfer apparatus of the present design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a back elevational view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus;

FIG. 8 is a reference figure showing a top view seen from a back-left hand side of the apparatus;

FIG. 9 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 10 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus;

FIG. 11 is a reference figure showing a right side view seen from a back side of the apparatus;

FIG. 12 is a reference figure showing a perspective view seen from the back-left hand side of the apparatus;

FIG. 13 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 14 is a reference figure showing a perspective view seen from the front-left hand side of the apparatus;

FIG. 15 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus; and,

FIG. 16 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus.

The broken line showing of wafers in some of the figures is included for the purpose of illustrating environment and forms no part of the claimed design.

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Claims as granted

1 claim

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Classifications

2 codes
USPC · US Patent Classification
D34/28D34/35

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File wrapper

⤢ drag to zoomJan 2005Jul 2005Jan 2006Jul 2006Jan 2007Jul 2007Jan 2008USPTOApplicantNon-final rejectionResponse after non-finalResponse after non-final
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Pendency
3.1 y
1,140 days filing → grant
Office actions
2
non-final + final
Responses
2
no RCE
Examiner
Cynthia E. Ramirez
art unit 2911 · TC 2900
Citations: 17 back · 0 forward

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Documents

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Chain of title

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