Inventor
Takehiro Shindo
Inventor
Nirasaki, JP
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1034%
H01LSemiconductor devices19%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
Y10TTechnical subjects covered by former us classification9%
F16KValves6%
B25JManipulators4%
B08BCleaning in general2%
B24BMachines, devices, or processes for grinding or polishing2%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors2%
G01BMeasuring length, thickness or similar linear dimensions2%
PatentTitleYear
11,075,106Transfer device202110,763,139Vacuum transfer module and substrate processing apparatus202010,748,796Substrate processing apparatus202010,586,729Transfer device and control method thereof202010,133,266Conveyance robot replacement apparatus and conveyance robot replacement method20189,805,960'Substrate conveyance method'20179,589,822'Substrate transfer method with a second positioning step'20179,082,798'Substrate collecting method'20158,821,644'Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium'20148,523,138'Vacuum processing apparatus'20138,216,382'Foreign matter removal method and storage medium'20128,159,653'Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same'20128,135,486'Substrate position determining method and substrate position detecting method'20128,113,487'Vacuum processing apparatus'20127,837,425'Transportation apparatus and drive mechanism'20107,611,124'Vacuum processing apparatus'2009D0562524'Wafer transfer apparatus'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2021Patents assigned to TOKYO ELECTRON LTD (17)· patent assignee history
2008–2020Based in Yamanashi, JP· patent location history
2009–2020Based in Nirasaki, JP· patent location history
2012–2015Patents assigned to SHINDO TAKEHIRO (7)· patent assignee history
2012Based in Kurokawa-gun, JP· patent location history
2014Patents assigned to HIROKI TSUTOMU (1)· patent assignee history
2014Patents assigned to KITAMURA AKINORI (1)· patent assignee history
2014Patents assigned to SAKURAGI ISAMU (1)· patent assignee history
2017–2021Based in Miyagi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 17 | 2008–2021 |
| SHINDO TAKEHIROself | 7 | 2012–2015 |
| HIROKI TSUTOMU | 1 | 2014 |
| KITAMURA AKINORI | 1 | 2014 |
| SAKURAGI ISAMU | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 8 | 2009–2020 |
| Miyagi, JP | 5 | 2017–2021 |
| Yamanashi, JP | 3 | 2008–2020 |
| Kurokawa-gun, JP | 1 | 2012 |