Inventor
Tsutomu Hiroki
Inventor
Nirasaki, JP
Overview
Patents· 39 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1034%
H01LSemiconductor devices17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests9%
B25JManipulators6%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors4%
H01JElectric discharge tubes or discharge lamps4%
F16KValves3%
Y10TTechnical subjects covered by former us classification3%
F16JPistons2%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact2%
PatentTitleYear
11,004,664Heat transfer medium supply system and substrate processing apparatus202110,763,764Stage and substrate processing apparatus202010,658,160Stage and substrate processing apparatus202010,502,508System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method201910,475,686Stage, stage manufacturing method, and heat exchanger201910,312,062Temperature control system and temperature control method20199,995,378Drive device and substrate processing system20189,947,564Conveyance base and conveyance system20189,520,309'Substrate processing apparatus and substrate processing method'20169,406,539'Substrate transfer apparatus'20169,312,153'Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element'20169,227,320'Transfer device and transfer method'20169,230,840'Substrate transfer device for substrate processing system'20169,209,055'Substrate processing apparatus'20159,165,810'Conveyance device and substrate processing system'20159,138,901'Transfer device, substrate processing system and posture control unit'20158,821,644'Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium'2014D0704753'Substrate conveyer for a substrate processing device'20148,590,861'Gate valve and substrate processing apparatus equipped with the same'20138,562,275'Transfer device and semiconductor processing system'20138,380,337'Vacuum processing apparatus and vacuum transfer apparatus'20138,057,153'Substrate transfer device, substrate processing apparatus and substrate transfer method'20117,857,569'Semiconductor processing system'20107,837,425'Transportation apparatus and drive mechanism'20107,780,391'Substrate processing device'20107,762,425'Vacuum container apparatus used for manufacturing semiconductor devices and lid apparatus for same'20107,706,907'Substrate processing apparatus, substrate processing method, computer program, and storage medium'20107,637,477'Gate valve apparatus of vacuum processing system'20097,622,008'Gate valve and vacuum container for semiconductor processing system'20097,572,742'Equipment and method for processing semiconductor'20097,398,692'Sealing ring and its managing system'2008D0562524'Wafer transfer apparatus'20087,286,890'Transfer apparatus for target object'20077,281,700'Gate valve apparatus for vacuum processing system'20076,709,521'Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system'20046,681,916'Transfer system for conveying LCD glass substrate'20046,331,095'Transportation system and processing apparatus employing the transportation system'20015,989,346'Semiconductor processing apparatus'19995,374,147'Transfer device for transferring a substrate'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994–2021Patents assigned to TOKYO ELECTRON LTD (39)· patent assignee history
1994–2021Based in Yamanashi, JP· patent location history
2004–2019Based in Nirasaki, JP· patent location history
2011–2016Patents assigned to HIROKI TSUTOMU (8)· patent assignee history
2013Patents assigned to MATSUSHITA MASANAO (1)· patent assignee history
2014Patents assigned to KITAMURA AKINORI (1)· patent assignee history
2015Patents assigned to KATO TOSHINAO (1)· patent assignee history
2015Based in Yamana, JP· patent location history
2019Based in Nirakaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 39 | 1994–2021 |
| HIROKI TSUTOMUself | 8 | 2011–2016 |
| KATO TOSHINAO | 1 | 2015 |
| KITAMURA AKINORI | 1 | 2014 |
| MATSUSHITA MASANAO | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 24 | 2004–2019 |
| Yamanashi, JP | 13 | 1994–2021 |
| Nirakaki, JP | 1 | 2019 |
| Yamana, JP | 1 | 2015 |