Inventor
ARUN CHAKRAVARTHY CHAKRAVARTHY
Inventor
IN
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps17%
C23CCoating metallic material11%
H01LSemiconductor devices11%
LOC1311%
B01FMixing, e.g. dissolving, emulsifying or dispersing6%
F17DPipe-line systems6%
G05DSystems for controlling or regulating non-electric variables6%
LOC146%
Y10TTechnical subjects covered by former us classification6%
PatentTitleYear
12,553,133Substrate handling system, method, and apparatus202612,444,621High conductance divert line architecture202512,424,414Semiconductor processing system with a manifold for equal splitting and common divert architecture2025D1069863Deposition ring of a process kit for semiconductor substrate processing2025D1064005Grounding ring of a process kit for semiconductor substrate processing2025D1059312Deposition ring of a process kit for semiconductor substrate processing202511,940,819Mass flow controller based fast gas exchange202411,881,416Gas delivery system for a shared gas delivery architecture2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2026Patents assigned to APPLIED MATERIALS INC (8)· patent assignee history
2024–2026Based in IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 8 | 2024–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| IN | 8 | 2024–2026 |