Wafer prober
Granted 16 Sep 1997 · no office action yet
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Munetoshi Nagasaka, Haruhiko Yoshioka, Osamu Kamata, Kazumi Yamagata +1 · Examiner: Antoine Duval Davis · AU 293 · TC 2900
Life of the patent
3 dated eventsDescription
1 parts›FIG. 1 is a top/front/left side perspective view…
FIG. 1 is a top/front/left side perspective view of a wafer prober showing our new design;
FIG. 2 is a top/front/left side perspective view thereof with a front cover open;
FIG. 3 is a front view thereof;
FIG. 4 is a top view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a back view thereof;
FIG. 7 is a left side view thereof; and,
FIG. 8 is a bottom view thereof.
Claims
1 · 1 independent · depth 1Classifications
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