Seal for chemical mechanical polishing device
Granted 18 Nov 2025 · 2 office actions
Assignee: Ebara Corporation
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Manato Furusawa, Makoto Kashiwagi, Kazuhiro Tajima · Examiner: Amber R Stiles · AU 2917 · TC 2900
Life of the patent
2 dated eventsDescription
1 parts›1. Seal for chemical mechanical polishing device 1…
1. Seal for chemical mechanical polishing device
1 . 1 : Perspective
1 . 2 : Front
1 . 3 : Back
1 . 4 : Top
1 . 5 : Bottom
1 . 6 : Right
1 . 7 : Left
1 . 8 : Cross sectional
1 . 9 : Enlarged
1 . 10 : Reference view
1 . 11 : Enlarged
The article is a seal for a top ring of a chemical mechanical polishing device. The feature of the design resides in the shape and configuration of the article as shown in the reproductions. Reproduction 1 . 8 is an enlarged cross-sectional view taken along the line 1 . 8 - 1 . 8 in Reproduction 1 . 4 . Reproduction 1 . 9 is an enlarged view of a portion 1 . 9 of the article in Reproduction 1 . 8 . Reproduction 1 . 11 is an enlarged view of the encircled portion in Reproduction 1 . 1 . The dashed broken lines shown in the reproductions illustrate environmental subject matter and form no part of the claimed design. The dot-dash broken lines shown in the reproductions represent boundaries that form no part of the claimed design. The two-dot-dash broken lines shown in the reproductions are for the purpose of encircling enlarged portions and form no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
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3 members · 3 offices›IP5 & PCT — 2 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D1102398-S | S1 | 18 Nov 2025 | 26 Sep 2023 | granted | Seal for chemical mechanical polishing device |
| JP | JP-1755379-S | S | 16 Oct 2023 | 30 Mar 2023 | granted | 化学的機械研磨装置用シール材ja |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D232309-S | S | 11 Jul 2024 | 26 Sep 2023 | published | 化學性機械研磨裝置用密封材之部分zh |
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