USPatentGranted
S1

Retaining ring for substrate

Granted 21 Mar 2023 · no office action yet

Assignee: Ebara Corporation

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Attorney: Attorney · Log in to unlock

Inventors: Kenichi Akazawa, Osamu Nabeya · Examiner: Calvin E Vansant · AU 2915 · TC 2900

Application
35/513,172
filed 16 Jun 2021
Publication
Not published
not published
Patent· this page
US D981459
granted 21 Mar 2023

Life of the patent

5 dated events
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Description

1 parts
›1. Retaining ring for substrate 1 . 1…

1. Retaining ring for substrate

1 . 1 : Perspective

1 . 2 : Perspective

1 . 3 : Bottom

1 . 4 : Top

1 . 5 : Front

1 . 6 : Cross sectional

1 . 7 : Cross sectional

1 . 8 : Cross sectional

This article is used to hold a substrate in a ring and polish one side of the substrate during the polishing process of wafers and other substrates in the manufacture of semiconductors and other products; the rear view, right side view, and left side view are all represented identically to the front view.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

2 codes
USPC · US Patent Classification
D15/138D13/182

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File wrapper

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Pendency
1.8 y
643 days filing → grant
Office actions
0
none on record
Examiner
Calvin E Vansant
art unit 2915 · TC 2900
Citations: 18 back · 0 forward

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Chain of title

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Citations

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