USPatentGranted
S1

Target profile for a physical vapor deposition chamber target

Granted 17 Nov 2020 · no office action yet

Application
29/726,094
filed 28 Feb 2020
Publication
Not published
not published
Patent· this page
US D902165
granted 17 Nov 2020

Life of the patent

5 dated events
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Description

1 parts
›FIG. 1 is a top perspective view of…

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right elevation view thereof;

FIG. 6 is a left elevation view thereof;

FIG. 7 is a front elevation view thereof;

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is an enlarged cross sectional view taken along line 9 - 9 in FIG. 4 .

The dashed lines in FIGS. 1-9 represent unclaimed environment and form no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims

1 · 1 independent · depth 1
1 granted claims

Classifications

1 codes
USPC · US Patent Classification
D13/182

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File wrapper

⤢ drag to zoomJan 2020Apr 2020Jul 2020Oct 2020Jan 2021USPTOApplicantNotice of allowance
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Pendency
0.7 y
263 days filing → grant
Office actions
0
none on record
Examiner
Elizabeth J Oswecki
art unit 2912 · TC 2900
Citations: 113 back · 0 forward

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Chain of title

⤢ drag to zoom20202022202420262028203020322034203620382040Owner 1
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Worldwide family

6 members · 3 offices
US2JP2TW2
this patentIP5 & PCTother officessolid = grantedhover for detail · click to open
Members
6
DOCDB simple family 67769548
Offices
3
US · JP
Granted
4 of 6
grant date present
Non-English titles
2
shown as filed, never translated
›IP5 & PCT — 4 members
OfficePublicationKindPublishedFiledStatusTitle
USUS-D877101-SS13 Mar 20209 Mar 2018grantedTarget profile for a physical vapor deposition chamber target
USthis patentUS-D902165-SS117 Nov 202028 Feb 2020grantedTarget profile for a physical vapor deposition chamber target
JPJP-1640252-SS2 Sep 20197 Sep 2018grantedno title held
JPJP-1651699-SS27 Jan 20207 Sep 2018grantedno title held
›Other offices — 2 members
OfficePublicationKindPublishedFiledStatusTitle
TWTW-D202101-SS11 Jan 202010 Sep 2018published用於物理氣相沉積腔室靶材的靶材輪廓zh
TWTW-D203691-SS1 Apr 202010 Sep 2018published用於物理氣相沉積腔室靶材的靶材輪廓zh

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