Inventor
William Johanson
Inventor
Gilroy, CA, US
Overview
Patents· 19 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material32%
H01JElectric discharge tubes or discharge lamps30%
LOC1316%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
H01LSemiconductor devices5%
H01FMagnets3%
PatentTitleYear
11,056,325Methods and apparatus for substrate edge uniformity202111,049,701Biased cover ring for a substrate processing system202111,024,490Magnetron having enhanced target cooling configuration2021D0902165Target profile for a physical vapor deposition chamber target2020D0894137Target profile for a physical vapor deposition chamber target202010,648,071Process kit having a floating shadow ring2020D0877101Target profile for a physical vapor deposition chamber target2020D0851613Target profile for a physical vapor deposition chamber target201910,283,334Methods and apparatus for maintaining low non-uniformity over target life201910,103,012One-piece process kit shield for reducing the impact of an electric field near the substrate2018D0825504Target profile for a physical vapor deposition chamber target20189,991,101Magnetron assembly for physical vapor deposition chamber20189,953,812Integrated process kit for a substrate processing chamber20189,909,206'Process kit having tall deposition ring and deposition ring clamp'2018D0797067'Target profile for a physical vapor deposition chamber target'20179,472,443'Selectively groundable cover ring for substrate process chambers'20169,315,891'Methods for processing a substrate using multiple substrate support positions'20167,737,035'Dual seal deposition process chamber and process'20106,405,101'Wafer centering system and method'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2010Patents assigned to NOVELLUS SYSTEMS INC (2)· patent assignee history
2002Based in San Jose, CA, US· patent location history
2010–2021Based in Gilroy, CA, US· patent location history
2016–2021Patents assigned to APPLIED MATERIALS INC (17)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 17 | 2016–2021 |
| NOVELLUS SYSTEMS INC | 2 | 2002–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Gilroy, California, US | 18 | 2010–2021 |
| San Jose, California, US | 1 | 2002 |