USPatent applicationPatented

Target profile for a physical vapor deposition chamber target

Granted 17 Nov 2020 · no office action yet

Application· this page
29/726,094
filed 28 Feb 2020
Publication
Not published
not published
Patent
US D902165
granted 17 Nov 2020

Life of the application

5 dated events
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Description

1 parts
›FIG. 1 is a top perspective view of…

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right elevation view thereof;

FIG. 6 is a left elevation view thereof;

FIG. 7 is a front elevation view thereof;

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is an enlarged cross sectional view taken along line 9 - 9 in FIG. 4 .

The dashed lines in FIGS. 1-9 represent unclaimed environment and form no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims as granted

1 claim

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Classifications

1 codes
USPC · US Patent Classification
D13/182

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File wrapper

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Pendency
0.7 y
263 days filing → grant
Office actions
0
none on record
Examiner
Elizabeth J Oswecki
art unit 2912 · TC 2900
Citations: 113 back · 0 forward

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Chain of title

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