Wafer holder for manufacturing semiconductor
Granted 20 Sep 2016 · no office action yet
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Hirokatsu Kobayashi, Wataru Machiyama, Eisuke Morisaki, Masayuki Harashima +1 · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
6 dated eventsDescription
1 parts›FIG. 1 is a front view of a…
FIG. 1 is a front view of a wafer holder for manufacturing semiconductor showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a front perspective view thereof;
FIG. 8 is an enlarged cross sectional view taken along line 8 - 8 in FIG. 1 ;
FIG. 9 is an enlarged portion view taken along line 9 - 9 in FIG. 1 ; and,
FIG. 10 is another front perspective view of FIG. 1 shown in a used condition with wafers shown in broken lines.
The features shown in dotted lines depict environmental subject matter only and form no part of the claimed design.
Claims
1 · 1 independent · depth 1Classifications
1 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this patent are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlockTerm & fees
See the term timeline — pendency span, in-force span, the maintenance fees paid and both computed expiry dates.
Log in to unlockValidity challenges
See the validity challenges on record — reexaminations, IPRs and PGRs, with their institution decisions and outcomes.
Log in to unlockCitations
See every patent this one cites and every patent that cites it back — publication, assignee, and how each one was found.
Log in to unlock