Wafer holder for manufacturing semiconductor
Granted 20 Sep 2016 · 1 office action
Assignee: Tokyo Electron Limited
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Attorney: Attorney · Log in to unlock
Inventors: Hirokatsu Kobayashi, Wataru Machiyama, Eisuke Morisaki, Masayuki Harashima +1 · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the application
6 dated eventsDescription
1 parts›FIG. 1 is a front view of a…
FIG. 1 is a front view of a wafer holder for manufacturing semiconductor showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a front perspective view thereof;
FIG. 8 is an enlarged cross sectional view taken along line 8 - 8 in FIG. 1 ;
FIG. 9 is an enlarged portion view taken along line 9 - 9 in FIG. 1 ; and,
FIG. 10 is another front perspective view of FIG. 1 shown in a used condition with wafers shown in broken lines.
The features shown in dotted lines depict environmental subject matter only and form no part of the claimed design.
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