Vaporizer for substrate processing apparatus
Granted 27 Oct 2015 · 4 office actions
Current assignee: Kokusai Electric Co. Ltd. · originally Hitachi, Ltd.
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Attorney: Attorney · Log in to unlock
Inventors: Daisuke Hara, Takuya Joda, Masahisa Okuno, Hideto Tateno · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the patent
10 dated eventsDescription
1 parts›FIG. 1 is a front, perspective view of…
FIG. 1 is a front, perspective view of a vaporizer for substrate processing apparatus showing our new design;
FIG. 2 is a front, bottom perspective view thereof;
FIG. 3 is a front elevational view thereof, the back elevation view being the same therefore omitted;
FIG. 4 is a left side elevational view thereof, the right side elevation view being the same therefore omitted;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a cross-sectional view taken along line 7 - 7 in FIG. 5 .
The back elevational view is the same as the front elevational view and has, therefore, been omitted; the right side elevational view is the same as the left side elevational view and has, therefore been omitted.
Claims
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D741823-S | S1 | 27 Oct 2015 | 9 Jan 2014 | granted | Vaporizer for substrate processing apparatus |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D169790-S | S | 11 Aug 2015 | 3 Jan 2014 | published | 基板處理裝置用氣化器之部分zh |
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