Vaporizer for substrate processing apparatus

FIG. 1 is a front, perspective view of a vaporizer for substrate processing apparatus showing our new design;

FIG. 2 is a front, bottom perspective view thereof;

FIG. 3 is a front elevational view thereof, the back elevation view being the same therefore omitted;

FIG. 4 is a left side elevational view thereof, the right side elevation view being the same therefore omitted;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a cross-sectional view taken along line 7 - 7 in FIG. 5 .

The back elevational view is the same as the front elevational view and has, therefore, been omitted; the right side elevational view is the same as the left side elevational view and has, therefore been omitted.