Inventor
Takuya Joda
Inventor
Toyama, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
C23CCoating metallic material21%
LOC137%
PatentTitleYear
11,035,037Substrate processing apparatus and metal member202110,985,017Method of manufacturing semiconductor device and non-transitory computer-readable recording medium20219,793,112'Method of manufacturing semiconductor device and non-transitory computer-readable recording medium'20179,646,862'Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium'20179,502,239'Substrate processing method, substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium'2016D0741823'Vaporizer for substrate processing apparatus'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2017Patents assigned to HITACHI INT ELECTRIC INC (4)· patent assignee history
2015–2021Based in Toyama, JP· patent location history
2016Patents assigned to AZ ELECTRONIC MAT (LUXEMBOURG) S A R I (1)· patent assignee history
2016Patents assigned to AZ ELECTRONIC MAT (LUXEMBOURG) S A R L (1)· patent assignee history
2021Patents assigned to KOKUSAI ELECTRIC CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI INT ELECTRIC INC | 4 | 2015–2017 |
| KOKUSAI ELECTRIC CORP | 2 | 2021 |
| AZ ELECTRONIC MAT (LUXEMBOURG) S A R I | 1 | 2016 |
| AZ ELECTRONIC MAT (LUXEMBOURG) S A R L | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Toyama, JP | 6 | 2015–2021 |