Segmented electroplating anode and anode segment
Granted 2 Oct 2012 · no office action yet
Current assignee: Novellus Systems, Inc. · originally Lam Research
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Attorney: Attorney · Log in to unlock
Inventors: Marshall Stowell, Jingbin Feng · Examiner: Derrick Holland · AU 2912 · TC 2900
Life of the patent
5 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a segmented electroplating anode and anode segment showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a left side elevation view thereof;
FIG. 6 is a right side elevation view thereof;
FIG. 7 is a top perspective view shown in environmental use; and,
FIG. 8 is a bottom perspective view shown in environmental use.
The broken lines shown represent unclaimed subject matter and form no part of the claimed design.
Claims
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2 members · 2 offices›IP5 & PCT — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| USthis patent | US-D668211-S | S1 | 2 Oct 2012 | 10 Sep 2010 | granted | Segmented electroplating anode and anode segment |
›Other offices — 1 members
| Office | Publication | Kind | Published | Filed | Status | Title |
|---|---|---|---|---|---|---|
| TW | TW-D152021-S | S | 21 Feb 2013 | 7 Mar 2011 | published | Segmented electroplating anode and anode segment |
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