USPatent applicationPatented

Segmented electroplating anode and anode segment

Granted 2 Oct 2012 · no office action yet

Current assignee: Novellus Systems, Inc. · originally Lam Research

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Inventors: Marshall Stowell, Jingbin Feng · Examiner: Derrick Holland · AU 2912 · TC 2900

Application· this page
29/369,658
filed 10 Sep 2010
Publication
Not published
not published
Patent
US D668211
granted 2 Oct 2012

Life of the application

5 dated events
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Description

1 parts
›FIG. 1 is a top perspective view of…

FIG. 1 is a top perspective view of a segmented electroplating anode and anode segment showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a right side elevation view thereof;

FIG. 7 is a top perspective view shown in environmental use; and,

FIG. 8 is a bottom perspective view shown in environmental use.

The broken lines shown represent unclaimed subject matter and form no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims as granted

1 claim

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Classifications

1 codes
USPC · US Patent Classification
D13/101

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File wrapper

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Pendency
2.1 y
753 days filing → grant
Office actions
0
none on record
Responses
1
no RCE
Examiner
Derrick Holland
art unit 2912 · TC 2900
Citations: 23 back · 0 forward

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Documents

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Chain of title

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