Segmented electroplating anode and anode segment
Granted 2 Oct 2012 · no office action yet
Current assignee: Novellus Systems, Inc. · originally Lam Research
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Marshall Stowell, Jingbin Feng · Examiner: Derrick Holland · AU 2912 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a segmented electroplating anode and anode segment showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a left side elevation view thereof;
FIG. 6 is a right side elevation view thereof;
FIG. 7 is a top perspective view shown in environmental use; and,
FIG. 8 is a bottom perspective view shown in environmental use.
The broken lines shown represent unclaimed subject matter and form no part of the claimed design.
Claims as granted
1 claimLog in to read the claims of this application.
Log in to unlockClassifications
1 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this application are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockDocuments
Log in to open the documents of this file: the application as filed, every office action and response, the notice of allowance.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlock