USPatentGranted
B2

Primer and pattern forming method for layer including block copolymer

Granted 17 Feb 2015 · 4 office actions

Life of the patent

3 dated events
⤢ drag to zoomJul 2011Jan 2012Jul 2012Jan 2013Jul 2013Jan 2014Jul 2014Jan 2015Prosecution
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Abstract

An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate ( 1 ), thereby forming a layer ( 2 ) composed of the undercoat agent, step (2) forming a layer ( 3 ) containing a block copolymer having a plurality of polymers bonded on the surface of the layer ( 2 ) composed of the undercoat agent, and subjecting the layer ( 3 ) containing the block copolymer to phase separation, and step (3) selectively removing a phase ( 3 a ) of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer ( 3 ) containing the block copolymer.

Claims

6 · 1 independent · depth 3
123456
6 granted claims

Classifications

18 codes
IPC · International Patent Classification
Section C — Chemistry; metallurgy
  • C09D161/06
  • C09D125/14
  • C08K5/45
  • C08L53/00
  • C08K5/42
Section G — Physics
  • G03F7/11
  • G03F7/20
  • G03F7/00
  • G03F7/26
  • G03F7/075
USPC · US Patent Classification
430/325430/273.1430/280.1430/326438/947430/281.1430/271.1430/285.1

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File wrapper

Pendency
3.4 y
1,254 days filing → grant
Office actions
2
non-final + final
Responses
2
no RCE
Examiner
Cynthia Hamilton
art unit 1722 · TC 1700
Citations: 45 back · 0 forward

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Priority chain

1 priority documents
›Priority documents — 1
TypeDocumentDate
related publicationUS 20140030652 A130 Jan 2014

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Citations

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