Primer and pattern forming method for layer including block copolymer
Granted 17 Feb 2015 · 4 office actions
Current assignee: Tokyo Ohka Kogyo Co., Ltd. · originally Riken
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Inventors: Takahiro Senzaki, Takahiro Dazai, Harumi Hayakawa, Shigenori Fujikawa +2 · Examiner: Cynthia Hamilton · AU 1722 · TC 1700
Life of the patent
3 dated eventsAbstract
An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate ( 1 ), thereby forming a layer ( 2 ) composed of the undercoat agent, step (2) forming a layer ( 3 ) containing a block copolymer having a plurality of polymers bonded on the surface of the layer ( 2 ) composed of the undercoat agent, and subjecting the layer ( 3 ) containing the block copolymer to phase separation, and step (3) selectively removing a phase ( 3 a ) of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer ( 3 ) containing the block copolymer.
Claims
6 · 1 independent · depth 3Classifications
18 codes- C09D161/06
- C09D125/14
- C08K5/45
- C08L53/00
- C08K5/42
- G03F7/11
- G03F7/20
- G03F7/00
- G03F7/26
- G03F7/075
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1 priority documents›Priority documents — 1
| Type | Document | Date |
|---|---|---|
| related publication | US 20140030652 A1 | 30 Jan 2014 |
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