Liquid application device, liquid application method, and nanoimprint system

A liquid application device comprising:na liquid discharge head having a structure in which nozzles configured to perform droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and are configured to pressurize the liquid in the liquid chambers;a relative movement unit configured to cause relative movement between the substrate and the liquid discharge head; anda droplet ejection control unit which is configured to operate the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and is configured to control operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head, wherein:in the liquid discharge head, a nozzle row constituted by the nozzles is sandwiched between the liquid chambers in such a manner that the liquid chambers are disposed on both sides of the nozzle row;the droplet ejection control unit is configured to control the operation of the piezoelectric elements according to each of the groups including a first nozzle group connected to first liquid chambers disposed on one side of the nozzle row being defined as a first group, and a second nozzle group connected to second liquid chambers disposed on the other side of the nozzle row being defined as a second group;the first liquid chambers and the second liquid chambers are compartmentalized for each nozzle; andthe piezoelectric elements have an integrated piezoelectric body for the first liquid chambers or the second liquid chambers and electrodes formed corresponding to compartments for the respective nozzles.

A liquid application method comprising the steps of causing relative movement between a substrate and a liquid discharge head having a structure in which nozzles configured to perform droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and are configured to pressurize the liquid in the liquid chambers, and causing the piezoelectric elements to operate with a predetermined droplet ejection period in such a manner that the liquid lands discretely on the substrate, wherein:nthe piezoelectric elements are operated so as to cause the liquid to land discretely on the substrate, the plurality of nozzles are grouped correspondingly to the structure of the liquid discharge head, and operation of the piezoelectric elements is controlled according to each of the groups;in the liquid discharge head, a nozzle row constituted by the nozzles is sandwiched between the liquid chambers in such a manner that the liquid chambers are disposed on both sides of the nozzle row;the droplet ejection control unit is configured to control the operation of the piezoelectric elements according to each of the groups including a first nozzle group connected to first liquid chambers disposed on one side of the nozzle row being defined as a first group, and a second nozzle group connected to second liquid chambers disposed on the other side of the nozzle row being defined as a second group;the first liquid chambers and the second liquid chambers are compartmentalized for each nozzle; andthe piezoelectric elements have an integrated piezoelectric body for the first liquid chambers or the second liquid chambers and electrodes formed corresponding to compartments for the respective nozzles.

A nanoimprint system comprising:na liquid discharge head having a structure in which nozzles configured to perform droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and are configured to pressurize the liquid in the liquid chambers;a relative movement unit configured to cause relative movement between the substrate and the liquid discharge head;a droplet ejection control unit which is configured to operate the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and is configured to control operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head; anda transfer unit configured to transfer a protrusion-depression pattern formed on a mold, wherein:in the liquid discharge head, a nozzle row constituted by the nozzles is sandwiched between the liquid chambers in such a manner that the liquid chambers are disposed on both sides of the nozzle row;the droplet ejection control unit is configured to control the operation of the piezoelectric elements according to each of the groups including a first nozzle group connected to first liquid chambers disposed on one side of the nozzle row being defined as a first group, and a second nozzle group connected to second liquid chambers disposed on the other side of the nozzle row being defined as a second group;the first liquid chambers and the second liquid chambers are compartmentalized for each nozzle; andthe piezoelectric elements have an integrated piezoelectric body for the first liquid chambers or the second liquid chambers and electrodes formed corresponding to compartments for the respective nozzles.