A method of generating EUV light, the method comprising:ndirecting a first pulse of radiation toward a target material droplet to form a modified droplet, the first pulse of radiation having an energy sufficient to alter a shape of the target material droplet;directing a second pulse of radiation toward the modified droplet to form an absorption material, the second pulse of radiation having an energy sufficient to change a property of the modified droplet, the property being related to absorption of radiation; anddirecting an amplified light beam toward the absorption material, the amplified light beam having an energy sufficient to convert at least a portion of the absorption material into extreme ultraviolet (EUV) light.
›2.↳ 1The method of claim 1, wherein:nthe modified droplet comprises a continuous segment of target material that has a width extending along a first direct…d2+1
The method of claim 1, wherein:nthe modified droplet comprises a continuous segment of target material that has a width extending along a first direction, and a thickness extending along a second direction that is different from the first direction and in the direction of propagation of the second pulse of radiation, andthe width is greater than the thickness.
›3.↳ 2The method of claim 2, wherein a plane that includes the first direction is angled relative to the direction of propagation of the second pulse of rad…d3
The method of claim 2, wherein a plane that includes the first direction is angled relative to the direction of propagation of the second pulse of radiation.
›4.↳ 1The method of claim 1, wherein the absorption material comprises a continuous segment of the target material.d2
The method of claim 1, wherein the absorption material comprises a continuous segment of the target material.
›5.↳ 1The method of claim 1, wherein the property of the modified droplet comprises one or more of an electron density and an ion density, and the absorptio…d2
The method of claim 1, wherein the property of the modified droplet comprises one or more of an electron density and an ion density, and the absorption material comprises plasma adjacent to a surface of a continuous segment of the target material.
›6.↳ 1The method of claim 1, wherein the property of the modified droplet comprises a surface area, and the absorption material comprises multiple pieces of…d2
The method of claim 1, wherein the property of the modified droplet comprises a surface area, and the absorption material comprises multiple pieces of target material, the multiple pieces having a collective surface area that is larger than the modified droplet.
›7.↳ 1The method of claim 1, wherein:nthe first pulse of radiation comprises a pulse of light having a wavelength of 10 μm, a pulse duration of 40 ns, and a…d2
The method of claim 1, wherein:nthe first pulse of radiation comprises a pulse of light having a wavelength of 10 μm, a pulse duration of 40 ns, and an energy of 20 mJ, andthe second pulse of radiation comprises a pulse of light wavelength of 1 μm, a pulse duration of 10 ns, and an energy of 5 mJ.
›8.↳ 1The method of claim 1, wherein:nthe first pulse of radiation comprises a pulse of light having a wavelength of 10 μm, a pulse duration of 20-70 ns, an…d2
The method of claim 1, wherein:nthe first pulse of radiation comprises a pulse of light having a wavelength of 10 μm, a pulse duration of 20-70 ns, and an energy of 15-60 mJ, andthe second pulse of radiation comprises a pulse of light wavelength of 1-10 μm, a pulse duration of 10 ns, and an energy of 1-10 mJ.
›9.↳ 1The method of claim 1, whereinnthe first pulse of radiation comprises a pulse of light having a wavelength of 1-10 μm, a pulse duration of 40 ns, and …d2
The method of claim 1, whereinnthe first pulse of radiation comprises a pulse of light having a wavelength of 1-10 μm, a pulse duration of 40 ns, and an energy of 20 mJ, andthe second pulse of radiation comprises a pulse of light having a wavelength of 1 μm, a pulse duration of 10 ns, and an energy of 1 mJ.
›10.↳ 1The method of claim 1, wherein the first pulse of radiation and the second pulse of radiation are pulses of light having a duration of 1 ns or greater…d2
The method of claim 1, wherein the first pulse of radiation and the second pulse of radiation are pulses of light having a duration of 1 ns or greater.
›11.↳ 1The method of claim 1, wherein the second pulse of radiation comprises a pulse of light having a duration of 1 ns to 100 ns.d2
The method of claim 1, wherein the second pulse of radiation comprises a pulse of light having a duration of 1 ns to 100 ns.
›12.↳ 1The method of claim 1, wherein the second pulse of radiation is directed toward the modified droplet 1-3 μs after the first pulse of radiation is dire…d2
The method of claim 1, wherein the second pulse of radiation is directed toward the modified droplet 1-3 μs after the first pulse of radiation is directed toward the target material droplet.
›13.↳ 1The method of claim 1, wherein the first pulse of radiation comprises a pulse of light having a duration of at least 1 ns, and the second pulse of rad…d2
The method of claim 1, wherein the first pulse of radiation comprises a pulse of light having a duration of at least 1 ns, and the second pulse of radiation comprises a pulse of light having a duration of at least 1 ns.
›14.↳ 1The method of claim 1, wherein at least 2% of the amplified light beam is converted to EUV radiation.d2
The method of claim 1, wherein at least 2% of the amplified light beam is converted to EUV radiation.
›15.↳ 1The method of claim 1, wherein the amplified light beam comprises a pulse of light, and a subsequent pulse of light is directed toward a second absorp…d2
The method of claim 1, wherein the amplified light beam comprises a pulse of light, and a subsequent pulse of light is directed toward a second absorption material no more than 25 μs after the amplified light beam is directed toward the absorption material, and the second absorption material is formed after the absorption material and formed from a second target material droplet.
›16.↳ 1The method of claim 1, wherein the first pulse of radiation comprises a pulse of radiation having a duration of 300 ps or less.d2+2
The method of claim 1, wherein the first pulse of radiation comprises a pulse of radiation having a duration of 300 ps or less.
›17.↳ 16The method of claim 16, wherein the first pulse of radiation comprises a pulse of radiation having a duration of 100 ps-300 ps.d3
The method of claim 16, wherein the first pulse of radiation comprises a pulse of radiation having a duration of 100 ps-300 ps.
›18.↳ 16The method of claim 16, wherein the modified droplet is a hemisphere shaped volume of particles of target material.d3
The method of claim 16, wherein the modified droplet is a hemisphere shaped volume of particles of target material.
