An object of the present invention is to provide a pattern measuring apparatus which performs high-accuracy concavity/convexity determination (e.g., distinguishing between a line segment and space) while simultaneously reducing the dose of a beam falling onto a pattern to be measured. To attain the object, this invention proposes a pattern measuring apparatus which specifies a pattern in a measurement object area by scanning a tilted bean with respect to another area different from the measurement object area and then performs measurement based on the pattern-specifying result. With such arrangement, it becomes possible to perform measurement without the risk of wrong pattern designation while lowering the dose of a beam hitting the measurement object area.

Claims

10 · 2 independent · depth 3

10 granted claims

›1.independentA pattern measuring apparatus, comprising:nan arithmetical unit for determining a pattern size by using a signal to be obtained based on scanning of a…+7

›2.↳ 1The pattern measuring apparatus according to claim 1, wherein the beam tilting deflector specifies the kind of a pattern formed on the sample based on…d2

›3.↳ 1The pattern measuring apparatus according to claim 1, wherein the beam tilting deflector deflects the charged particle beam in such a manner that the …d2+1

›5.↳ 1The pattern measuring apparatus according to claim 1, wherein the beam tilting deflector is a deflector for moving a visual field.d2+1

›7.↳ 1The pattern measuring apparatus according to claim 1, wherein the arithmetical unit determines whether the pattern formed on the sample is a line patt…d2

›8.↳ 1The pattern measuring apparatus according to claim 1, wherein the arithmetical unit determines whether the pattern formed on the sample is a core gap …d2

›9.independentA pattern measuring apparatus having an arithmetical unit for determining a pattern size by using a signal to be obtained based on scanning of a charg…+1

Classifications

9 codes

IPC · International Patent Classification

Section G — Physics

G01N23/00

Section H — Electricity

H01J37/28
H01J37/256

USPC · US Patent Classification

250/492.22250/310250/306250/311250/492.3250/396.R

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Pendency

0.8 y

299 days filing → grant

Office actions

none on record

Responses

1 RCE

Examiner

Nikita Wells

art unit 2881 · TC 2800

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Citations: 8 back · 0 forward

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