Method of fabricating a damascene copper inductor structure using a sub-0.18 um CMOS process

(1) Field of the Invention

The present invention relates to methods used to fabricate semiconductor devices, and more specifically to a method used to integrate the fabrication of an inductor structure, and the fabrication of complimentary metal oxide semiconductor, (CMOS), devices.

(2) Description of Prior Art

Impedance matching is needed for radio frequency, (RF), integrated circuits. Inductor structures, comprised of conductive materials are sometimes used to provide the needed impedance matching function. A quality factor, or an inductance quality factor, of the inductor structure, is critical in determining the needed matching function for the integrated circuits. To satisfy process cost objectives, and to integrate with IF band circuit, the fabrication of the needed inductor is usually integrated into the fabrication process used to create the CMOS devices for integrated circuits, such as RF circuits.

This invention will describe a process for fabricating sub-micron, or sub-0.18 um, CMOS devices, in which the formation of the inductor structure is integrating into the CMOS fabrication process, featuring a thick, inductor structure, placed overlying a sub-metal layer. The thick, inductor layer, comprised of copper, is formed using only one additional photolithographic masking step, used to remove insulator layer from the top surface of the underlying sub-metal layer. A damascene process, used to form copper damascene structures, for the CMOS devices, also allows the formation of the thick copper inductor structure, in the opening exposing the sub-metal layer. The increased thickness of this copper layer results in an increased Q factor. Prior art, such as Yu et al, in U.S. Pat. No. 5,770,509, describe processes for forming inductor devices using substrate biasing procedures. That prior art however, does not describe the novel process sequence described in this present invention, in which a thick copper inductor structure, is formed simultaneously with adjacent CMOS devices, featuring the placement of the thick copper inductor structure, directly overlying a sub-metal layer, resulting in a inductor quality factor greater than the quality factor obtained from counterpart, thinner, inductor structures.

It is an object of this invention to integrate the formation of an inductor structure, into a fabrication process used to fabricate CMOS devices.

It is another object of this invention to form a copper inductor structure, using the same damascene, or a dual damascene process, used for fabrication of the CMOS metal interconnect structures.

It is yet another object of this invention to use one additional masking step, to form an opening in an insulator layer, to accommodate the copper inductor structure, overlaying and contacting, a sub-metal layer.

It is still yet another object of this invention to form a thick, copper inductor structure, to increase the Q, or quality factor of the copper inductor structure.

In accordance with the present invention a method of integrating the formation of a thick, dual damascene, copper inductor structure, with a high Q factor, into a fabrication process used to form sub-0.18 um, CMOS devices, is described, where the term 0.18 um refers to the channel length of an individual CMOS device. After formation of a sub-metal structure, used as a lower level, metal interconnect structure, for CMOS devices, an intermetal dielectric, (IMD), layer is deposited. A first opening is formed in the IMD layer, exposing a first portion of the sub-metal structure, in a region to be used for the copper inductor structure. Dual damascene openings are next formed in the same IMD layer, exposing second portions of the sub-metal layer, in a region to be used for the sub-0.18 um CMOS devices. A copper layer is next deposited, completely filling the first opening, and the dual damascene openings, followed by a chemical mechanical polishing procedure, resulting in copper, dual damascene structures, overlying and contacting the second portion of the sub-metal layer, and resulting in a copper inductor structure, located in the first opening in the IMD layer, overlaying and contacting the first portion of the sub-metal layer

The object and other advantages of this invention are best described in the preferred embodiment with reference to the attached drawings that include:

FIGS. 1-5, 6 B, which schematically shows, in cross-sectional style, describe key stages of fabrication, used to integrate the formation of a copper inductor structure, into a CMOS device, fabrication process.

FIG. 6A, which schematically shows the top view of the copper inductor structure.

The method of integrating the formation of a copper inductor structure, featuring an unproved quality factor, with the formation of narrow channel length, CMOS devices, will now be described in detail. A semiconductor substrate, not shown in the drawings is used, with region 1 , of the semiconductor substrate, used for narrow channel, or sub-0.18 um, CMOS devices, and region 2 , of the semiconductor substrate, allotted for a subsequent inductor structure. A first, intermetal dielectric layer 3 , shown schematically in FIG. 1, is comprised of either silicon oxide, or borophoshosilicate glass, (BPSG), at a thickness between about 6000 to 8000 Angstroms. Openings, not shown in the drawings, are formed in IMD layer 3 , exposing underlying conductive regions, such as lower level, metal interconnect structures, in CMOS region 1 , or exposing underlying conductive regions, such as lower level metal structures, or regions of semiconductor substrate, in inductor structure region 2 . The deposition and patterning of a sub-metal layer, are next addressed resulting in sub-metal structure 5 a , in CMOS region 1 , overlying, and contacting, lower level metal interconnect structures, while sub-metal structure 5 b , is defined in inductor region 2 , located on IMD layer 3 . Sub-metal structure 5 b , is separated from the semiconductor substrate, or from conductive regions that in turn communicate with the semiconductor substrate, by the thickness of IMD layer 3 . This is schematically shown in FIG. 1 . Sub-metal structures 5 a , and 5 b , can be comprised of copper, or chosen from a group that includes, copper, aluminum, or tungsten, with the metal layer obtained via plasma vapor deposition, (PVD), or via chemical vapor deposition, (CVD), at a thickness between about 4000 to 5000 Angstroms. The definition of these sub-metal structures is realized via photolithographic and reactive ion etching, (RIE), procedures, using Cl 2 as an etchant. After removal of the photoresist shape, used for definition of the sub-metal structures, via plasma oxygen ashing and careful wet cleans, IMD layer 6 , is deposited, via low pressure chemical vapor deposition, (LPCVD), or via plasma enhanced chemical vapor deposition, (PECVD), procedures, at a thickness between about 7000 to 7600 Angstroms. IMD layer 6 , schematically shown in FIG. 1, can be comprised of silicon oxide or BPSG, with the thickness of this layer establishing the critical thickness of a subsequent inductor structure.

The one additional photolithographic procedure, needed to integrate the fabrication of the inductor structure, in region 2 , into the process used to form CMOS devices, in region 1 , is next addressed, and schematically described in FIG. 2 . Photoresist shape 7 , is formed on IMD layer 6 , and used as a mask to allow inductor opening 8 , to be defined in IMD layer 6 . Inductor opening 8 , is formed via an anisotropic RIE procedure, using CHF 3 as an etchant, exposing sub-metal structure 5 b . The shape of inductor opening 8 , can best be seen in FIG. 6A, which will show the subsequent inductor structure, inlaid in opening 8 . Photoresist shape 7 , is then removed via plasma oxygen ashing and careful wet cleans.

The dual damascene openings, formed in IMD layer 6 , exposing regions of sub-metal structure 5 a , located in CMOS region 1 , are next addressed, and schematically shown in FIGS. 3 and 4. First, photoresist shape 9 , is formed, completely covering inductor opening 8 , in inductor region 2 , with photoresist shape 9 , comprised of narrow diameter openings, exposing a portion of the top surface of IMD layer 6 , in CMOS region 1 . An anisotropic RIE procedure, using CHF 3 as an etchant, is used to form narrow diameter openings 10 a , in IMD layer 6 . Narrow diameter openings 10 a , with a diameter between about 2600 to 3600 Angstroms, can be defined to a depth of between about 6000 to 8000 Angstroms, in IMD layer 6 , as schematically shown in FIG. 3, or if desired narrow diameter openings 10 a , can be formed to expose portions of the top surface of sub-metal structure 5 a . After removal of photoresist shape 9 , via plasma oxygen ashing and careful wet cleans, photoresist shape 21 , is formed, again completely covering inductor opening 8 , while a wide diameter opening, in photoresist shape 21 , exposes narrow diameter openings 10 a , and exposes a top portion of the unetched IMD layer 6 . A selective, anisotropic RIE procedure, again using CHF 3 as an etchant, is than employed to create dual damascene opening 12 , in IMD layer 6 , comprised of wide diameter opening 11 , in a top portion of IMD layer 6 , comprised with a diameter larger then 4600 Angstroms, and comprised of narrow diameter openings 10 b , formed using narrow diameter openings 10 a , as a mask, exposing portions of the top surface of sub-metal structure 5 a . The selectivity of IMD layer 6 , to the sub-metal structure is greater than 10 to 1, allowing this procedure to stop at the appearance of the sub-metal structure. Photoresist shape 21 , is then removed via plasma oxygen ashing and careful wet cleans. If desired dual damascene opening 12 , can be replaced by a single damascene opening procedure, with the damascene opening in IMD layer 6 , exposing a single portion of the top surface of sub-metal structure 5 a , in CMOS region 1 .

The formation of copper inductor structure 14 , in inductor opening 8 , as well as the formation of dual damascene copper interconnect structures 13 , in dual damascene opening 12 , will next be addressed, and schematically shown in FIG. 5. A barrier layer of titanium nitride, not shown in the drawings, is first deposited via PVD procedures, at a thickness between about 200 to 300 Angstroms. The titanium nitride barrier, will prevent copper poisoning of underlying, and adjacent materials, such as IMD layer 6 . A thin copper layer, not shown in the drawings, is deposited via PVD or CVD procedures, at a thickness between about 600 to 650 Angstroms, and is used to provide a nucleation layer for an electo-chemical deposited, (ECD), layer, obtained at a thickness between about 8000 to 8500 Angstroms, completely filling inductor opening 8 , as well as completely filling dual damascene opening 12 . The ECD copper layer is formed via plating conditions, to a thickness between about 8000 to 8500 Angstroms. If desired only the ECD copper layer can be used without the use of the barrier, or nucleation layers. The thickness of the ECD copper layer, for this case is identical to the thickness of ECD copper, used as part of the composite layer. Chemical mechanical polishing is then used to remove regions of the ECD copper layer, regions of the copper nucleation layer, and regions of titanium nitride barrier layer, from the top surface of IMD layer 6 , creating copper inductor structure 14 , in inductor opening 8 , and creating dual damascene copper structure 13 , in dual damascene opening 12 . If desired a selective RIE procedure, using Cl 2 as an etchant, can be used to selectively remove regions of unwanted material from the top surface of IMD layer 6 . The thickness of copper inductor structure 14 , related to the thickness of IMD layer 6 , results in an improved Q factor, or inductance, for the inductor structure. For example the Q factor, or inductance, for circuits operating at a frequency of about 2 Ghz, for the copper inductor structure with a thickness of about 7300, is about 8, while similar circuits, operating at the same frequency, but using a copper inductor structure at a thickness of only 6300 Angstroms, results in a Q factor of only about 7. If desired other metals, such as tungsten, aluminum, or aluminum based layers, can be used in place of copper.

FIG. 6A, shows a top view of the copper inductor structure, where the shape of copper inductor structure 14 , can be observed. Schematically shown in FIG. 6A, is the intersection of copper inductor structure 14 , and sub-metal structure 5 b , accomplished in opening 8 . FIG. 6B, schematically shows a cross-sectional view of the copper inductor structure.

While this invention has been particularly shown and described with reference to, the preferred embodiments thereof, it will be understood by those skilled in the art that various in form and detail may be made without departing from the spirit and scope of this invention.