Pedestal for a substrate processing system

FIG. 1 is a top perspective view of a pedestal for a substrate processing system;

FIG. 2 is a bottom perspective view;

FIG. 3 is another top perspective view;

FIG. 4 is another bottom perspective view;

FIG. 5 is a top view;

FIG. 6 is a bottom view;

FIG. 7 is a front side view;

FIG. 8 is a back side view;

FIG. 9 is a left side view;

FIG. 10 is a right side view;

FIG. 11 is an enlarged view of area 11 shown in FIG. 3 ;

FIG. 12 is an enlarged view of area 12 shown in FIG. 5 ;

FIG. 13 is a perspective view of area 11 shown in FIG. 3 ;

FIG. 14 is an enlarged view of area 14 shown in FIG. 5 ; and,

FIG. 15 is a cross-sectional view taken along line 15 shown in FIG. 5 .

The dash-dash broken lines in the drawings are for the purpose of illustrating portions of the article that form no part of the claimed design. The dash-dot broken lines define the enlarged views and form no part of the claimed design.