Inventor
Krishna BIRRU
Inventor
US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C23CCoating metallic material17%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%
LOC1311%
H01LSemiconductor devices6%
H05HPlasma technique6%
PatentTitleYear
D1117121Pedestal for a substrate processing system2026D1117120Pedestal for a substrate processing system202612,394,608Cleaning system for removing deposits from pump in an exhaust of a substrate processing system202512,227,837Ex situ coating of chamber components for semiconductor processing202512,163,219Ex situ coating of chamber components for semiconductor processing202411,365,479Ex situ coating of chamber components for semiconductor processing2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to LAM RES CORP (6)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 6 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 6 | 2022–2026 |