Showerhead reflector

FIG. 1 is a front isometric top view of a showerhead reflector for a substrate processing system.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a first side view thereof taken along line 4 - 4 of FIG. 2 .

FIG. 5 is a second side view thereof taken along line 5 - 5 of FIG. 2 .

FIG. 6 is a third side view thereof taken along line 6 - 6 of FIG. 2 .

FIG. 7 is a fourth side view thereof taken along line 7 - 7 of FIG. 2 .

FIG. 8 is another front isometric top view thereof assembled with three additional showerhead reflectors; and,

FIG. 9 is another top plan view thereof assembled with the three additional showerhead reflectors.

The broken lines shown in FIG. 8 and FIG. 9 show an environment in which the showerhead reflector can be positioned that forms no part of the claimed design. All other broken lines shown in FIGS. 1-9 illustrate portions of the showerhead reflector assembly that form no part of the claimed design.