Deposition chamber showerhead

FIG. 1 is an isometric top side view of a deposition chamber showerhead for a substrate processing system.

FIG. 2 is an isometric bottom side view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a first side view thereof taken along line 5 - 5 of FIG. 3 .

FIG. 6 is a second side view thereof taken along line 6 - 6 of FIG. 3 .

FIG. 7 is a third side view thereof taken along line 7 - 7 of FIG. 3 .

FIG. 8 is a fourth side view thereof taken along line 8 - 8 of FIG. 3 .

FIG. 9 is a fifth side view thereof taken along line 9 - 9 of FIG. 1 .

FIG. 10 is another front isometric top view thereof assembled with three additional deposition chamber showerheads.

FIG. 11 is another top plan view thereof assembled with the three additional deposition chamber showerheads.

FIG. 12 is another side isometric bottom view thereof assembled with three additional deposition chamber showerheads; and,

FIG. 13 is another bottom plan view thereof assembled with the three additional deposition chamber showerheads.

The broken lines shown in FIGS. 10-13 show an environment in which the deposition chamber showerhead can be positioned that forms no part of the claimed design. All other broken lines shown in FIGS. 1-13 illustrate portions of the deposition chamber showerhead that form no part of the claimed design.