Substrate processing unit

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/606,724, filed herewith and entitled “Substrate Processing Unit”; and

Application Ser. No. 29/606,730, filed herewith and entitled “Substrate Processing Unit”.

FIG. 1 is a front, top and right side perspective view of a substrate processing unit according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is another perspective view thereof, shown with an unclaimed cover.

The broken lines in the figures depict unclaimed portions of the substrate processing unit and form no part of the claimed design.