Inventor
Hiromichi Kawasaki
Inventor
Tokyo, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps24%
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
LOC1518%
C23CCoating metallic material12%
PatentTitleYear
10,522,333Vacuum processing apparatus2019D0847237Substrate processing unit201910,128,141Plasma processing apparatus and plasma processing method2018D0831086Substrate processing unit2018D0831085Substrate processing unit20189,378,929'Plasma processing apparatus and plasma processing method'20168,951,385'Plasma processing apparatus and plasma processing method'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2019Patents assigned to HITACHI HIGH TECH CORP (7)· patent assignee history
2015–2016Based in Shunan-shi, JP· patent location history
2018–2019Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 7 | 2015–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 5 | 2018–2019 |
| Shunan-shi, JP | 2 | 2015–2016 |