Air flow controller for heater of substrate processing apparatus

FIG. 1 is a front, bottom and right side perspective view of an air flow ontroller for heater of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken in the direction of line 8 - 8 in FIG. 2 .

The broken lines immediately adjacent to the shaded areas represent the bounds of the claimed design while all other broken lines are directed to environment; the broken lines form no part of the claimed design.